Choi Jae-seong: Semiconductor Equipment Component Technology Engineering

The semiconductor is in place in the center of everyday life that we live in today. AI, the Internet, the Auto-Charid Cars, the smart factory, and other high-tech rice are half-conducting. It takes an essential part-conductor device to make semiconductors. Anticonductor equipment is a high-tech drug, such as mechanical engineering, electrical and electronic engineering, control engineering, optics, physics, chemistry, and new materials. The semiconductor manufacturing equipment has a main frame with a whole range of key modules, including heaters, plasma devices, counter-transmission devices, gas and kemic supply. Each module device is also made up of several combinations of parts. As the process of making semiconductor chips becomes more and more micro-size, so is the anticonductor equipment used in manufacturing processes. This book is a book that has the kind of key modules that make up semiconductor equipment, and the function, the operation principles, and all the components and features that make these core modules. It's designed to help us understand the principle of motion. The anticonductor equipment is constantly developing, but the principles of the component technology of the semiconductor device are basically the same. The book has been written to make it easier for the public, as well as students, to understand the component technology of equipment.

Korean title: 반도체 장비요소 기술공학

Korean author: 최재성

Korean publisher: 북스힐

ISBN-13: 9791159714566